发明名称 |
INHIBITION OF TITANIUM CORROSION |
摘要 |
A composition for removing resist, polymeric material and/or etching residue from a substrate comprising titanium or an alloy thereof, the composition comprising hydroxylamine or a derivative thereof and at least one compound having the general formula (I) wherein: R<1> and R<3> are each independently selected from H, OH, CO2H, halogen, C1-C3 alkyl, C1-C3 alkoxy or (CH2)nOH wherein n is 1, 2 or 3; and R2 is selected from C9-C16 alkyl, or C9-C16 alkoxy. |
申请公布号 |
WO0178129(A1) |
申请公布日期 |
2001.10.18 |
申请号 |
WO2001GB01686 |
申请日期 |
2001.04.12 |
申请人 |
EKC TECHNOLOGY, LTD.;DAVIOT, JEROME;AFFROSSMAN, STANLEY;HOLMES, DOUGLAS |
发明人 |
DAVIOT, JEROME;AFFROSSMAN, STANLEY;HOLMES, DOUGLAS |
分类号 |
C23F1/00;C09D9/00;G03F7/42;H01L21/02;H01L21/306;H01L21/311;H01L21/3213;(IPC1-7):H01L21/321 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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