发明名称 |
Method for adjusting frequency of electronic component |
摘要 |
A method for adjusting the frequency of an electronic component device includes the step of etching an electrode disposed on a surface of the electronic component device by irradiating an ion beam onto the electrode. The ion beam irradiation is performed while moving at least one of the electronic component device and the ion beam in directions along the surface on which the electrode is disposed.
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申请公布号 |
US2001030293(A1) |
申请公布日期 |
2001.10.18 |
申请号 |
US20010816898 |
申请日期 |
2001.03.23 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
MIZUGUCHI TAKASHI;KAWABATA SHOICHI |
分类号 |
H01L21/302;H01L21/3065;H01L41/09;H03H3/04;H03H3/10;(IPC1-7):G21G5/00;A61N5/00 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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