| 摘要 |
An image observation method and a scanning electron microscope (SEM) which permit one to observe an SEM image under optimum conditions adapted for the specimen type and purpose of the observation. The microscope has a memory in which accelerating voltage ranges and spot size ranges corresponding to specimen types are stored. When an operator wants to make a certain observation, he first selects an observation mode using a pointing device. A controller then controls a display control circuit to display a condition-selecting menu. The operator selects necessary conditions from the condition-selecting menu. Then, observation conditions optimal in the selected conditions are read from the memory.
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