发明名称 |
UV-enhanced, in-line, infrared phosphorous diffusion furnace |
摘要 |
A thermal processing apparatus for thermally processing a workpiece having a process chamber, a workpiece support positioned inside of the process chamber, a heater positioned inside of the process chamber to heat the workpiece; and an ultraviolet light source positioned inside of the process chamber to irradiate ultraviolet light onto the workpiece.
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申请公布号 |
US2001031229(A1) |
申请公布日期 |
2001.10.18 |
申请号 |
US20010795667 |
申请日期 |
2001.02.26 |
申请人 |
SPJUT REED E.;KRUZEK RAYMOND T.;RICHERT CARSON T.;SZILAGYI ANDREI |
发明人 |
SPJUT REED E.;KRUZEK RAYMOND T.;RICHERT CARSON T.;SZILAGYI ANDREI |
分类号 |
B01J19/12;H01L21/00;H05B3/00;(IPC1-7):B01J19/08 |
主分类号 |
B01J19/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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