发明名称 |
METHOD FOR PRODUCING A SINGLE-CRYSTALLINE FILM |
摘要 |
A method for producing a single-crystalline film made of a single crystal of lithium potassium niobate-lithium potassium tantalate solid solution or a single crystal of lithium potassium niobate, comprising the steps of preparing a target made of a material for the single-crystalline film, preparing a foundation made of a single crystal of lithium potassium niobate-lithium potassium tantalate solid solution or a single crystal of lithium potassium niobate, irradiating upon the target, thereby gasifying molecules constituting the target by dissociation and evaporation thereof, and epitaxially growing the single-crystalline film on the foundation.
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申请公布号 |
US2001029884(A1) |
申请公布日期 |
2001.10.18 |
申请号 |
US19990320335 |
申请日期 |
1999.05.26 |
申请人 |
IMAEDA MINORU;YOSHINO TAKASHI |
发明人 |
IMAEDA MINORU;YOSHINO TAKASHI |
分类号 |
C30B25/02;C30B23/02;C30B29/30;G02B6/13;G02F1/355;G02F1/377;H01L21/20;(IPC1-7):C30B28/14;C30B23/00;C30B25/00;C30B28/12 |
主分类号 |
C30B25/02 |
代理机构 |
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地址 |
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