发明名称 METHOD FOR PRODUCING A SINGLE-CRYSTALLINE FILM
摘要 A method for producing a single-crystalline film made of a single crystal of lithium potassium niobate-lithium potassium tantalate solid solution or a single crystal of lithium potassium niobate, comprising the steps of preparing a target made of a material for the single-crystalline film, preparing a foundation made of a single crystal of lithium potassium niobate-lithium potassium tantalate solid solution or a single crystal of lithium potassium niobate, irradiating upon the target, thereby gasifying molecules constituting the target by dissociation and evaporation thereof, and epitaxially growing the single-crystalline film on the foundation.
申请公布号 US2001029884(A1) 申请公布日期 2001.10.18
申请号 US19990320335 申请日期 1999.05.26
申请人 IMAEDA MINORU;YOSHINO TAKASHI 发明人 IMAEDA MINORU;YOSHINO TAKASHI
分类号 C30B25/02;C30B23/02;C30B29/30;G02B6/13;G02F1/355;G02F1/377;H01L21/20;(IPC1-7):C30B28/14;C30B23/00;C30B25/00;C30B28/12 主分类号 C30B25/02
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