CIRCUIT FOR SENSING ACCELERATION OF THREE-AXIS DIRECTIONS USING TRIPLE BRIDGE STRUCTURE

摘要

PURPOSE: A circuit for sensing acceleration of three-axis directions is provided, enable the user to manufacture micro sensors through a batch production process by adding a circuit with simple configuration to the terminal next to the differential amplifier. CONSTITUTION: A circuit comprises an x-axis detection bridge, a y-axis detection bridge and a z-axis detection bridge which detects acceleration in z-axis by using change in voltage caused due to the change in resistances at both ends of the x-axis detection bridge and y-axis detection bridge. Resistances have same size, such that the synthesize resistance of the x-axis detection bridge and the y-axis detection bridge becomes equal to a reference resistance(Rref) which is formed in an area avoiding influence to the change in acceleration so as to form the reference resistance as a fixed resistance. A pair of piezoelectric materials are disposed in the position opposite to the beam.