| 摘要 |
<p>A simple -1X, catadioptric projection relay system (e.g., a modified Wynne-Dyson relay) (108) is combined with a linear scanning and object and image indexing systems to provide good imagery over a useful field which is two or more times wider than the field size of the projection system and arbitrarily long. The projection system (108) has opposed and parallel object and image planes and produces an image in which object and image vectors in one direction are parallel and in a normal direction are opposed. The reticle (202) and substrate (110) are clamped and scanned together in the parallel direction and are indexed in the normal direction by equal and opposite amounts between scans. An example shows how a 2.5 micron resolution, i-line projection system with a 300 mm wide field could be used to expose a 550 mm substrate in two scans to yield a very high throughput.</p> |
