摘要 |
A sensor element for deformation measurement has a basic body (1) the deformation of which is measured and in which are formed two capacitors (C1,C2), each with two electrodes (3,4). The deformation of the basic body causes a change in the electrode gap (d) of both capacitors, which leads to an increase in capacitance in one (C1) of the capacitors and to a large extent, proportional reduction in capacitance in the other capacitor (C2). The capacitors (C1,C2) are connected up differentially so that the capacitance reduction subtracted from the capacitance increase, is available as a measurement signal at the output of the sensor element.
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