发明名称 MICRO-MECHANICAL WAVEGUIDE OPTICAL DEVICES
摘要 <p>Optical devices and methods for attenuating, shuttering, or switching optical signals as found in telecommunications. A platform carrying a portion of a waveguide and residing in a plane of a substrate is tipped, tilted, twisted, or otherwise moved out of the plane of the substrate to divert the path of an optical signal or to change coupling between adjacent waveguides. The platform can be formed by etching a substrate while leaving one or more connection points between the platform and the substrate to hold the platform to the substrate.</p>
申请公布号 WO2001077742(A2) 申请公布日期 2001.10.18
申请号 US2001012201 申请日期 2001.04.12
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