APPARATUS FOR DETECTING WAFER PROTRUSION OF SMIF SYSTEM

摘要

PURPOSE: An SMIF(Standard Mechanical Interface) system is provided to detect a protrusion of wafers loaded in an SMIF cassette, thereby preventing a breakage of the wafer. CONSTITUTION: In the SMIF system, a frame(240) for mounting a sensor for detecting a wafer protrusion surrounds a carrier(250). A sensing part is mounted to the frame(240) for detecting the protrusion of a wafer(220) loaded in each slot of the carrier(250). The sensing part comprises a light emitting device(230) and a light receiving device(231). The light receiving device(231) is received a light emitted from the light emitting device(230) and transferred to an electrical value. The transferred valve is applied to a motor driving controller.