| 摘要 |
An inspection apparatus by which an increased number of semiconductor devices can be inspected simultaneously. The inspection apparatus includes a driver for outputting a signal to be used for inspection, a branching point to which the output terminal of the driver is connected, a current limiting element interposed between each of the terminals of the semiconductor devices to be inspected and the branching point, and a capacitor connected in parallel to each of the current limiting elements. A resistor or a thermistor, for example, is used for the current limiting element.
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