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发明名称
PRODUCTION OF PHOTORESIST COATINGS
摘要
申请公布号
EP1145607(A1)
申请公布日期
2001.10.17
申请号
EP19990963506
申请日期
1999.12.11
申请人
VANTICO AG
发明人
SETIABUDI, FRANS
分类号
G03F7/16;G03F7/38;G03F7/40;H05K3/00;H05K3/28;H05K3/46;(IPC1-7):H05K3/00
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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