发明名称 |
Apparatus and method for measuring mechanical strength of neck portion of seed crystal and method for producing silicon single crystal |
摘要 |
There are disclosed an apparatus for measuring mechanical strength of a neck portion of silicon seed crystal used for growing a silicon single crystal by the Czochralski method, characterized in that the apparatus has a structure that a seed chuck for holding the seed crystal of a test sample is provided at an end of a wire hung from an upper hook, and a crystal holder for holding the other end part of the test sample from below is tied to a lower hook with another wire to support the holder, and comprises a means for pulling the hook(s) at a predetermined rate, and a measuring means for continuously measuring tensile load, and a measuring method utilizing the apparatus. There are provided an apparatus and a method for accurately measuring mechanical strength of neck portion of a silicon seed crystal with good precision and reproducibility, as well as a method for producing a silicon single crystal characterized in that a single crystal ingot is grown under conditions affording good balance of productivity and safety, which conditions have been found based on the data obtained by the aforementioned apparatus and method. |
申请公布号 |
EP0942276(A3) |
申请公布日期 |
2001.10.17 |
申请号 |
EP19990301517 |
申请日期 |
1999.03.01 |
申请人 |
SHIN-ETSU HANDOTAI COMPANY LIMITED |
发明人 |
HARADA, ISAMU;ODA, MICHIAKI;TOYOSHIMA, MASARU;MURAI,TOSHINARI;IINO,EIICHI |
分类号 |
G01N3/02;G01N3/08 |
主分类号 |
G01N3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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