| 摘要 |
An angular velocity sensor for detecting angular velocity components about three axes with high response is provided. A weight body (40) carries out a circular movement along a circular orbit (41) within the XY-plane with the origin O being as a center. The weight body (40) is supported so that it can be moved with a predetermined degree of freedom within a sensor casing. A Coriolis force Fco exerted in the Z-axis direction to the weight body (40) is detected when the weight body (40) passes through the X-axis at the point Px and an angular velocity omega x about the X-axis is obtained based on the detected force. Further, a Coriolis force Fco exerted in the Z-axis direction to the weight body (40) is detected when the weight body (40) passes through the Y-axis at the point Py and an angular velocity omega y about the Y-axis is obtained based on the detected force. In addition, a force exerted in the X-axis direction to the weight body (40) at the point Px is detected and an angular velocity omega z about the Z-axis is obtained based on the detected force by eliminating a centrifugal force. <IMAGE> |
