| 摘要 |
<p>The invention relates to a device for determining the spatial distribution of properties of a notably heterogeneous sample (1). The device comprises: a microscope (2) having a control (21) for the three-dimensional section of the topography zn (x,y) of the surface n of a sample (1); a probe (3) having a control (31) for the high-resolution detection of one or more properties Pj of the sample (1) on the topography zn(x,y) of the surface n; a device (4) for removing material, for example a plasma etching device for etching with reactive gases or liquids or for chemomechanical polishing, which has a control (41) and by means of which in a removal process An, n+1 a layer can be removed from the surface n of the sample (1); a computer-assisted image processing device (6) which is equipped such that from a sequence of surface topographies zn(x,y) to zn+m(x,y) determined by the microscope and from the properties Pj(zn(x,y)) to Pj(zn+m(x,y)) detected on said topographies it is able to generate a three-dimensional image of the sample.</p> |
