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发明名称
Method and equipment for the application of wear resistant coatings by high vacuum physical vapour deposition
摘要
申请公布号
EP0752482(B1)
申请公布日期
2001.10.17
申请号
EP19960810433
申请日期
1996.07.01
申请人
BERGMANN, ERICH
发明人
BERGMANN, ERICH
分类号
C23C14/24;C23C14/02;C23C14/54;C23C14/58;H01J37/32;(IPC1-7):C23C14/32;C23C14/56
主分类号
C23C14/24
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代理人
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