发明名称 |
Low capacitance contact structure for a solid state image sensor |
摘要 |
<p>This invention concerns a novel structure to create a low capacitance floating diffusion without changing or adding steps to the image sensor fabrication process. It consists of incorporation of a novel structure at the contact area between the floating diffusion and the gate electrode that reduces the junction capacitance of the floating diffusion and improves the sensitivity of the device (the structure features overlapping contact, gate, metalization and n-type regions which provide the electrical contact between the floating diffusion and the gate). Additionally, the structure has a low resistance diffusion region that is self aligned with a gate electrode. <IMAGE></p> |
申请公布号 |
EP0723299(B1) |
申请公布日期 |
2001.10.17 |
申请号 |
EP19960100379 |
申请日期 |
1996.01.12 |
申请人 |
EASTMAN KODAK COMPANY |
发明人 |
GUIDASH, ROBERT MICHAEL;ERHARDT, HERBERT J.;STEVENS, ERIC GORDON |
分类号 |
H01L21/339;H01L27/148;H01L29/762;(IPC1-7):H01L27/148 |
主分类号 |
H01L21/339 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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