Method and system of managing wafers in a semiconductor device production facility

摘要

A method and a system is provided to automatically manage wafers in a semiconductor device production facility. Wafers to be processed in a clean room are automatically identified, tracked and sorted on a single wafer basis. By means of a wafer attribute information, including the unique position data and the entirety of a specific treatment to which the wafer is subjected, the processing of each wafer is controlled without the necessity to place wafers of respective lots in a single wafer cassette.