| 摘要 |
The invented apparatus can be used to monitor the radiant energy delivered to a substrate for treatment thereof. The radiant energy can be laser light or light generated by a flash-lamp, for example. The apparatus includes an energy-tapping member such as a beam splitter, that is positioned between a source and optical element(s) used to generate and modify radiant energy, and a substrate to be treated with the radiant energy. The energy-tapping member receives radiant energy from the source and optical element(s), and divides the radiant energy from the source and optical element(s) into two portions. The first portion of radiant energy travels from the energy-tapping member to the substrate for treatment thereof. The apparatus includes an energy sensor such as a photodiode, arranged to receive the second portion of radiant energy. The energy sensor generates a signal indicative of the radiant energy supplied to the substrate. The energy-tapping member is preferably positioned optically downstream from the optical element(s) as the last or near last element encountered by the radiant energy. As so positioned, thermal or mechanical drifts in the optical element(s) have little or no impact on the ability of the invented apparatus to determine the amount of radiant energy supplied to the substrate. The apparatus can include a processing unit coupled to receive the sensor signal, which integrates the sensor signal to generate a signal indicative of the amount of radiant energy supplied to the substrate. The processing unit can also generate a visual display of the amount of radiant energy supplied to the substrate. The invention also includes related methods.
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