发明名称 Environmentally benign bismuth-containing spin-on precursor materials
摘要 Metal acid salt complexes are provided comprising (1) a first metal ion consisting essentially of bismuth, and optionally, at least one second metal ion selected from the group consisting of barium, calcium, strontium, lead, titanium, tantalum, and niobium, and (2) a polyether acid. The metal acid salt complexes are prepared by combining (1) bismuth ion, and optionally, at least one second metal ion and (2) at least one of a polyether acid and a polyether acid anhydride prepared from the polyether acid. In particular, the use of a mixture of bismuth, strontium, and niobium and/or tantalum salts of the hydrophilic acid 3,6-dioxaheptanoic acid salt is described for production of ceramic thin films, such as for use in ferroelectric devices, using non-toxic solvents. As a consequence, improved electronic devices are formed from less toxic and easier handled precursors and solvents. The present invention provides soluble spin-on precursors which are compatible and soluble in non-toxic and environmentally benign solvents.
申请公布号 US6303804(B1) 申请公布日期 2001.10.16
申请号 US19990394422 申请日期 1999.09.13
申请人 RAYTHEON COMPANY 发明人 DOUGHERTY T. KIRK;DRAB JOHN J.;RAMER O. GLENN
分类号 B05D5/12;C07F7/00;C07F9/00;C07F19/00;(IPC1-7):C07F19/00 主分类号 B05D5/12
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