MICROSTRUCTURE AND ITS MANUFACTURING METHOD, AND ETCHING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a microstructure and its manufacturing method, and an etching device capable of manufacturing a microstructure with a smooth inclining surface in a short manufacturing time. SOLUTION: A plurality of thin films 30A having a predetermined two-dimensional pattern are formed on a substrate 1, and an inclining surface 30a inclining to the substrate 1 is formed on a side surface of each of the thin films 30A. The plurality of the thin films 30A are peeled from the substrate 1 and are laminated on a stage 6 to manufacture the microstructure 8 having an inclining part 8a on the stage 6.