发明名称 Method and apparatus for operating a microacoustic sensor array
摘要 A method and apparatus are proposed for operating a microacoustic sensor arrangement, for example, to determine the physical characteristics of a measurement medium. Acoustic surface waves with predetermined wave modes are generated and detected by electroacoustic transducers (6) and a measurement for the physical characteristics of the measurement medium is determined from their propagation behavior along a propagation path. In addition, a sagittally polarized surface wave is generated in the area of the surface of the substrate (5; 22) on which the measurement medium is located.
申请公布号 US6304021(B1) 申请公布日期 2001.10.16
申请号 US20000581111 申请日期 2000.06.08
申请人 ROBERT BOSCH GMBH 发明人 WOLF KONRAD;HECHT HANS;HERRMANN FALK
分类号 G01N9/00;G01N11/16;G01N29/00;G01N29/02;(IPC1-7):G01N29/02;G01L41/08 主分类号 G01N9/00
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