APPARATUS AND METHOD FOR PROCESSING

摘要

A holding member is set, which sucks at a contact face, only a part of the periphery of a process area of a sheet-like article to hold the article. The holding member and the sheet-like article are moved relatively in such manner that the contact face is not physically in touch with an already processed area while the contact face maintains its suction to the sheet-like article. A deformation of the already processed area or a mixture of foreign articles to the already processed area can be prevented.