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发明名称
摘要
申请公布号	JP2001518695(A)	申请公布日期	2001.10.16
申请号	JP20000514237	申请日期	1998.08.28
申请人		发明人
分类号	B65G49/07;B25J15/08;B25J17/02;B25J18/02;G05B15/00;G06F19/00;H01L21/00;H01L21/677;H01L21/68;H01L21/687;(IPC1-7):H01L21/68	主分类号	B65G49/07
代理机构		代理人
主权项
地址

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