| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide automatic calibration equipment that can reproducibly and reliably operate a wafer handling robot. SOLUTION: A controller 24 in the automatic calibration equipment has a memory and a logic circuit, and is connected to a robot 22. The robot has an articulated arm 36 movable vertically Z, horizontallyθand radially R, and a wafer holding plate 42 at the end of the arm. The memory of the controller stores the dimensional characteristics of enclosures forming process stations 32 and of the wafer holding plate. Each enclosure and the wafer holding plate of the robot have sensors 44, 48 and 68, which send signals about the position of the wafer holding plate to the controller. The controller is programmed to execute, at the enclosures of the process stations, a series of sequential movements of the robot controlled by a combination of the signals from the sensors and the dimensional characteristic values.</p> |
