发明名称 Method for polishing surface of vapor-phase synthesized thin diamond film
摘要 A surface of a vapor-phase deposited, synthetic thin diamond film is polished by:preparing a polishing liquid of silicon dioxide powder particles having an average particle size within the range of from 5 to 1,000 nm dispersed and distributed in an aqueous solution in an amount of from 5 to 40 wt. %, the dispersion having a coefficient of viscosity of from 1 to 200 cP and a pH of from 8 to 12.5, applying the polishing liquid to a surface of a vapor-phase synthetic thin diamond film and bringing a flat surface of a stool composed of a soft artificial or natural organic material into contact with the surface; and repetitively applying a mutual planar movement under pressure between the surface of said stool and the surface of the thin diamond film.
申请公布号 US6302768(B1) 申请公布日期 2001.10.16
申请号 US20000680402 申请日期 2000.10.05
申请人 MITSUBISHI MATERIALS CORPORATION 发明人 ADACHI MIKI
分类号 B24B1/00;B24B37/00;B24B37/04;C23C16/27;C23C16/56;H01L21/027;H01L21/04;H01L21/304;H01L21/306;(IPC1-7):H01L21/302 主分类号 B24B1/00
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