发明名称 BATCH ASSEMBLY OF HIGH DENSITY HERMETIC PACKAGES FOR POWER SEMICONDUCTOR CHIPS
摘要 <p>Batch assembly methods for high density packaging of power semiconductor chi ps (32) in hermetic thin packaging include providing silicon chip arrays with thermocompressively bonded-foil contacts (38), preparing ceramic lid arrays (10) which contain upper surface and lower margin direct-bonded copper coverings (18) and throu gh- the-lid high current spherical conductors (16), coining Cu/Mo/Cu or copper cup arrays (44), die mounting within each respective cup a respective semiconductor chip (32), su- perpositionally registering a lid array (10) with a strip form of cup array, and solder (21) reflowing to hermetically seal as hermet- ic thin packaging within a registered set of cup (44) and lid arrays (10).</ SDOAB></p>
申请公布号 CA2080690(C) 申请公布日期 2001.10.16
申请号 CA19912080690 申请日期 1991.12.20
申请人 GENERAL ELECTRIC COMPANY 发明人 NEUGEBAUER, CONSTANTINE ALOIS;TEMPLE, VICTOR ALBERT KEITH
分类号 H01L21/50;H01L21/52;H01L23/04;H01L23/538;(IPC1-7):H01L21/52;H01L21/60 主分类号 H01L21/50
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