POLISHING SLURRY REGENERATION APPARATUS

摘要

PROBLEM TO BE SOLVED: To remove an unnecessary component at a low cost and effectively, in a polishing slurry regeneration apparatus. SOLUTION: In collecting slurry used for polishing as collected slurry and regenerating the collected slurry into regenerated slurry, a cyclone separator 41 sizes the slurry to a predetermined size and uses the slurry with predetermined size as regenerated slurry. In regenerating the collected slurry into the regenerated slurry, the regenerated slurry is irradiated with ultrasonic waves from an ultrasonic wave generator 43.