| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming a liquid particle film or a solid particle film in a fine region by a liquid target such as a liquid prepared by mixing, dispersing or anulsifying a liquid or solid particles or a liquid, in which a gas is incorporated. SOLUTION: One of the liquid 8 prepared by mixing, dispersing or emulsifying a liquid or solid particles and the liquid, in which the gas is incorporated, is used as the target, DC voltage or AC voltage having DC bias voltage is applied to electrodes, one of which is the target, to release the micronized target in another electrode 3 direction and the particles contained in the target are deposited on the specified region to form the liquid particle film or the solid particle film.
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