发明名称 Read-only memory and fabrication method
摘要 The read-only memory takes the form of an integrated circuit. The data stored in the read-only memory include a first data record and a second data record in the form of corresponding first and second structures, respectively, of the integrated circuit. The first structures are fabricated by means of a lithographic projection method with the use of a mask and the second structures are fabricated by means of a lithographic beam writing method without the use of a mask. The invention enables the storage of individual, specialized data for the read-only memory within a primarily mask-programmed ROM.
申请公布号 US6303474(B1) 申请公布日期 2001.10.16
申请号 US20000494775 申请日期 2000.01.31
申请人 INFINEON TECHNOLOGIES AG 发明人 STEFFEN CHRISTIAN
分类号 H01L21/8246;(IPC1-7):H01L21/425 主分类号 H01L21/8246
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