摘要 |
The read-only memory takes the form of an integrated circuit. The data stored in the read-only memory include a first data record and a second data record in the form of corresponding first and second structures, respectively, of the integrated circuit. The first structures are fabricated by means of a lithographic projection method with the use of a mask and the second structures are fabricated by means of a lithographic beam writing method without the use of a mask. The invention enables the storage of individual, specialized data for the read-only memory within a primarily mask-programmed ROM.
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