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发明名称
摘要
申请公布号	JP3219056(B2)	申请公布日期	2001.10.15
申请号	JP19980227964	申请日期	1998.08.12
申请人		发明人
分类号	C07C13/06;H01L21/302;H01L21/3065;H01L21/311;H01L21/312;H01L21/338;H01L29/812;(IPC1-7):H01L21/306	主分类号	C07C13/06
代理机构		代理人
主权项
地址

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