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发明名称
摘要
申请公布号	JP3219788(B2)	申请公布日期	2001.10.15
申请号	JP19910129770	申请日期	1991.05.31
申请人		发明人
分类号	H01L21/285;H01L21/28;H01L21/3205;H01L21/768;H01L23/52;(IPC1-7):H01L21/768	主分类号	H01L21/285
代理机构		代理人
主权项
地址

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