| 发明名称 |
Chemical method for removal and analysis of boron impurities in tetraethylorthosilicate (teos) |
| 摘要 |
A method of purifying tetraethylorthosilicate (TEOS) to remove boron impurities therefrom, and a related method of analyzing TEOS to determine concentration of boron impurities therein. |
| 申请公布号 |
AU4591801(A) |
申请公布日期 |
2001.10.15 |
| 申请号 |
AU20010045918 |
申请日期 |
2001.03.21 |
| 申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
THOMAS H. BAUM;CHONG-YING XU;FRANK R. HEDGES;DAVID DANIEL BERNHARD;BRIAN L. BENAC;SCOTT L. BATTLE;JOHN M. LANSDOWN |
| 分类号 |
C07F7/04;C07F7/20 |
主分类号 |
C07F7/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
