| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron optical system array wherein various kinds of conditions such as miniaturization, high precision, and reliability are achieved in high levels. SOLUTION: Each has a first electrode and a second electrode having a membrane provided with a plurality of openings and a substrate supporting the membrane, and also has a spacer for retaining a space between both membranes of the first electrode and the second electrode. The spacer is supported on the membrane. For example, the spacer has an insulating body, and is arranged in a position avoiding the opening.
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