| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that it is difficult to precisely and quickly detect a relative minor defect which is present in the outer peripheral part of an objective area corresponding to an object to be inspected in conventional defect inspection for inspecting the defect of the object to be inspected based on an inspection picture obtained by image picking-up the object to be inspected and a previously obtained reference picture. SOLUTION: A boundary line between an objective area corresponding to an object to be inspected kin a reference picture and a background area other than the objective area is extracted, and a shift picture obtained by moving each pixel of the inspection picture by prescribed amounts along the boundary line is generated, and the defective of the object to be inspected is inspected based on a difference between each corresponding pixel of the shift picture and the inspection picture. Thus, it is possible to precisely and quickly detect the relatively minor defect. |
