发明名称 |
MICROMACHINED ELEMENT AND METHOD OF FABRICATION THEREOF |
摘要 |
A micromachined element mounted to a substrate, the element including a cantilever having a proximal portion attached to the substrate and a coilable distal portion terminating in a free distal end. The coilable distal portion, upon being heated, is capable of bending away from the substrate and at least partially coiling upon itself to form a coiled portion. At least part of the micromachined element may be electrically conductive. In various embodiments, the micromachined element may function as a mechanical microspring, an electrically conductive link, and/or a magnetic coil. A method of fabricating the microelement may include the steps of selectively depositing various layers upon the substrate.
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申请公布号 |
CA2305069(A1) |
申请公布日期 |
2001.10.12 |
申请号 |
CA20002305069 |
申请日期 |
2000.04.12 |
申请人 |
NEW JERSEY INSTITUTE OF TECHNOLOGY |
发明人 |
ZHANG, YANWEI;MARCUS, ROBERT B. |
分类号 |
B81B3/00;G01R1/067;G01R3/00;(IPC1-7):B81C1/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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