FLEXIBLE SUSPENDED GAS DISTRIBUTION MANIFOLD FOR PLASMA CHAMBER

摘要

PROBLEM TO BE SOLVED: To provide a gas inlet manifold for a plasma chamber, which minimizes mechanical stress based on the thermal expansion of a gas distribution plate. SOLUTION: The gas inlet manifold for the plasma chamber is used. In the gas inlet manifold for the plasma chamber, a perforated gas distribution plate 20 is suspended by flexible side walls 24. The flexible suspension 24 minimizes the mechanical stress due to the thermal expansion of the gas distribution plate 20. In another feature, the suspension 24 provides the thermal isolation between the gas distribution plate 20 and other components of the chamber.