发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and its manufacturing method which can form an inter-power-source capacitance without needing a new space, and improve the noise resistance or high frequency characteristics of power lines without increasing the pads. SOLUTION: In a semiconductor device having a multilayer wiring structure composed of a plurality of wiring layers and pad regions 13 disposed around an inner region 11 on the surface central part, various elements such as inter- power-source capacitances 19, protective elements 31 and input/output elements forming I/O regions 12 are formed below the pad regions 13.
申请公布号 JP2001284537(A) 申请公布日期 2001.10.12
申请号 JP20000100732 申请日期 2000.04.03
申请人 NEC CORP 发明人 NONAKA AKIRA
分类号 H01L21/3205;H01L21/82;H01L21/822;H01L23/485;H01L23/52;H01L23/522;H01L23/528;H01L27/04 主分类号 H01L21/3205
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