COOLER FOR VOICE COIL MOTOR IN LITHOGRAPHY PROJECTOR

摘要

PROBLEM TO BE SOLVED: To enhance positioning accuracy by improving a cooling means for absorbing heat generated by a voice coil motor used for positioning a mask holding table or a substrate holding table in a lithography projector such that heat loss to the surrounding is reduced. SOLUTION: The coil 3 of a voice coil motor 100 for a mask table or a substrate table comes into thermal contact with a cooling jacket 4 having at least one channel 10 for circulating cooling fluid. The channel is located substantially in a part of the cooling jacket contiguous to the coil so that heat is removed from the coil to cooling medium directly through contact over a large area, thus reducing the quantity of heat dissipated to the surroundings substantially. The cooling jacket may be made of ceramic and preferably made integrally.