发明名称 SURFACE-EMITTING SEMICONDUCTOR LASER AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a surface-emitting semiconductor laser that oscillates in a single horizontal mode, and can obtain a high-output laser beam, and its manufacturing method. SOLUTION: A surface-emitting semiconductor laser 100 includes a resonator 120. The resonator 120 is formed by laminating a lower mirror 102, an active layer 103, and an upper mirror 117. The upper mirror 117 includes first and second mirror parts 114 and 108. In a reflection factor adjustment layer 104, a part that is included in the first mirror 114 has film thickness for meeting Bragg reflection conditions, a part that is included in the second mirror 108 has film thickness for meeting anti-Bragg reflection conditions, and the reflection factor of the first mirror 114 is larger than that of the second mirror 108.
申请公布号 JP2001284722(A) 申请公布日期 2001.10.12
申请号 JP20000091802 申请日期 2000.03.29
申请人 SEIKO EPSON CORP 发明人 KONDO TAKAYUKI
分类号 H01S5/183;(IPC1-7):H01S5/183 主分类号 H01S5/183
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