| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized piezoelectric resonator which has few defectives as product, and is high in reliability and is adaptive to high frequencies. SOLUTION: The piezoelectric resonator is equipped with a base body 1, a support film 3 which is formed of silicon nitride on the top surface of the base body 1, and a vibration body 7 which is provided on the opposite surface of the support film 3 from the base body 1 and has a piezoelectric body 5 sandwiched between a couple of electrodes 4 and 6; and a protective film 2 made of silicon nitride is provided on the top surface of the support film 3 on the side of the base body 1 and the intensity ratio of the peak of an Si-H bond to the peak of an Si-N bond of a spectrum by infrared absorption analysis of the support film 3 and protective film 2 is 0.03 or larger for the protection film and 0.02 or smaller for the support film 3.
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