| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam exposure system not required to be installed in a magnetically shielded room, less affected by a magnetic field produced by a linear motor, and high in accuracy. SOLUTION: An illuminating lens system 1, a projection lens system 2, a reticle chamber 3, and a wafer chamber 4 are made of thick ferromagnetic material respectively, so that an external magnetic field hardly penetrates into an electron beam lens tube. Partitioning plates 11, 12, 13, and 14 have each a structure in which three ferromagnetic plates are laminated together, interposing a non-magnetic material between them, and they are each fixed on the inner upper and inner under surfaces of the reticle chamber 3 and the wafer chamber 4. By this setup, a partition is formed between the reticle chamber 3 in which a linear motor is provided, the wafer chamber 4 and the electron beam lens tube, so that a magnetic field from a linear motor can be blocked.
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