| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive magnetic thin film which is superior in manufacturability, easily manufactured, can be increased in thickness, and has soft magnetic properties, a magnetic part provided with the same, their manufacturing methods, and an electric power converter. SOLUTION: A polyimide film is formed as thick as 10μm on a silicon board, and a magnetic thin film formed of Fe fine particle-containing polyimide film of thickness 20μm is formed thereon. A patterned Ti/Au film and a Ti/Au connecting conductor are formed on the magnetic thin film, a polyimide film of thickness 10μm, and Cu coils each of height 35μm, width 90μm, and space 25μm and a polyimide layer filling a space between the Cu coils are formed thereon. A magnetic thin film such as a polyimide film, that contains Fe fine particles, is formed thereon through the intermediary of a polyimide film of thickness 10μm. This thin film inductor is small in AC resistance.
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