发明名称 ELECTROMAGNETIC WAVE TRANSMISSION DEVICE, ELECTROMAGNETIC WAVE RESONANCE DEVICE, PLASMA PROCESSING DEVICE, EXPOSURE SYSTEM, AND DEVICE MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an electromagnetic resonance device small in dead space, simple in structure, capable of preventing sealing members from being deformed, hardened, and damaged by protecting them against microwaves. SOLUTION: An electromagnetic resonance device is equipped with dielectric blocks 12 and 11, a dielectric block 13 provided with a mounting flange, a holding member 15 which holds the dielectric block 12 and is provided with a terminating face 26 which terminates as leakage electromagnetic waves, and a sealing means 20 provided between the flange of the dielectric block 13 and the holding member 14. Provided that the guide wavelength of microwaves is represented by λg, the electric length of a homogenized line 23 is set as an integer times as long as λg/2, an electric length between the sealing member 20 and the terminating face 26 is set as an even number times as long as λg/4, and an electric length between the homogenized line 23 and the terminating face 26 is set as an even number times as long as λg/4.
申请公布号 JP2001284238(A) 申请公布日期 2001.10.12
申请号 JP20000099837 申请日期 2000.03.31
申请人 OMI TADAHIRO;KOMATSU LTD 发明人 OMI TADAHIRO;SHINOHARA HISAKUNI;HIRAYAMA MASAKI;TAKEHISA KIWAMU;ITO TAKASHI
分类号 H05H1/46;G03F7/20;H01L21/027;H01L21/205;H01L21/302;H01L21/3065;H01P1/04;H01P1/08;H01S3/225 主分类号 H05H1/46
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