| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an X-ray exposure system which can obtain a desired stripe image on an exposure surface. SOLUTION: In the optical path through which X-rays radiated from an X-ray source reach the X-ray mask, a filter having an absorption coefficient which varies depending upon photon energy is set up. When the mask pattern of the X-ray mask contains a plurality of X-ray blocking areas arranged in parallel at regular intervals and X-ray transmitting areas demarcated between adjacent X-ray blocking areas,|PS-PT|(where, PS and PT respectively represent the intensities of the X-rays on the exposed surface corresponding to the center of the X-ray transmitting areas and the exposed surface corresponding to the center of the X-ray intercepting areas) becomes larger when the filter is set up than the case where the filter is removed.</p> |
