| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus such as an electron beam drawing apparatus or the like enabling improvement of a current density, and retaining uniformity of charged particle beams at the same time. SOLUTION: By forming a Wehnelt electrode 23 of an electron gun into a conical shape, electron beams radiating from a tip 25 in multiple directions are converged in one direction. An electrode angle of the conical shape is set to 150 to 160 degrees. Thereby, beam current is improved and improvement of picture drawing throughput can be achieved.
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