| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect detection method and a computer readable recording medium capable of accurately extracting contact inferiority indicating abnormal contrast without receiving the influence of charge up or shot noise. SOLUTION: The image data of a plurality of charge beam images including the image of a contact area are taken in, the image data of the contact area are extracted from the image data of the charge beam image, and the image data of the center area of the contact area are prepared from the extracted image data of the contact area every contact, while the image data of an area going around the contact out of the outside area of the contact are prepared every contact, the contrast of each contact area is calculated by using the obtained center area image data and the going-around area image data and the different parts of the charge beam image are detected by comparing the contrast with the contacts corresponding to the calculated contrast respectively. |
