| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and method for realizing highly precise defect inspection by easily and accurately correcting the distortion of the image of an object to be detected generated due to the constitution of this device. SOLUTION: This defect inspecting device is constituted of an illuminating means 13 for illuminating a target object, an image pickup means 14 for image picking-up an objective image based on a diffraction light from the target object, a deciding means for fetching a first picture obtained from the image pickup means 14 when using a reference object in which a prescribed pattern is formed as the target object, and for deciding the parameter of the device 10 based on the first picture, a correcting means for fetching a second picture obtained from the image pickup means 14 when using an object 11 to be detected as the target object, and for correcting the distortion of the second picture according to a correction formula including the parameter decided by the deciding means, and a detecting means for detecting the defect of the object 11 to be detected based on the second picture corrected by the correcting means. In this case, the deciding means, the correcting means, and the detecting means are included in a picture processor 15. |
