| 摘要 |
PROBLEM TO BE SOLVED: To improve the performance of a piezoelectric actuator, an ink-jet head comprising it, and an ink-jet type recording device, by providing an electrode having various performances desired for a piezoelectric actuator. SOLUTION: A common electrode of a piezoelectric actuator 16 has a 2-layer structure comprising an inside electrode layer 17 of Pt which is hard to react with a piezoelectric film 18, and an outside electrode layer 23 of Cr which is more excellent than Pt in vibration characteristics, adhesion characteristics and the like. Related to the piezoelectric actuator 16, the outside electrode layer 23 acting as a diaphragm as well, the inside electrode layer 17, the piezoelectric film 18, and an individual electrode 15 comprising Pt are laminated in order. |
