| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a spin valve film capable of obtaining high reading signal output when the spin valve film is used as a reading element of a thin film magnetic head. SOLUTION: A stage for forming the spin valve film 1 having two preceding and following film-forming processes comprises a stage for interrupting the film-forming process for a prescribed period at least one time, a stage for exposing the film into plasma, a stage for putting the film into another vacuum chamber having a lower degree of vacuum, a stage for putting the film into a vacuum chamber having high H2O or O2 concentration and a stage for subjecting the film to surface treatment by using a gas containing >=1 ppm H2O or O2 or a stage for leaving the film for a prescribed period while letting a process gas flow, after the preceding process is completed and before the following process is performed. |
